JPH0343232Y2 - - Google Patents

Info

Publication number
JPH0343232Y2
JPH0343232Y2 JP1987150601U JP15060187U JPH0343232Y2 JP H0343232 Y2 JPH0343232 Y2 JP H0343232Y2 JP 1987150601 U JP1987150601 U JP 1987150601U JP 15060187 U JP15060187 U JP 15060187U JP H0343232 Y2 JPH0343232 Y2 JP H0343232Y2
Authority
JP
Japan
Prior art keywords
substrate
holder
pallet
holding mechanism
circular opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987150601U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6453755U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987150601U priority Critical patent/JPH0343232Y2/ja
Publication of JPS6453755U publication Critical patent/JPS6453755U/ja
Application granted granted Critical
Publication of JPH0343232Y2 publication Critical patent/JPH0343232Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1987150601U 1987-09-30 1987-09-30 Expired JPH0343232Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987150601U JPH0343232Y2 (en]) 1987-09-30 1987-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987150601U JPH0343232Y2 (en]) 1987-09-30 1987-09-30

Publications (2)

Publication Number Publication Date
JPS6453755U JPS6453755U (en]) 1989-04-03
JPH0343232Y2 true JPH0343232Y2 (en]) 1991-09-10

Family

ID=31423892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987150601U Expired JPH0343232Y2 (en]) 1987-09-30 1987-09-30

Country Status (1)

Country Link
JP (1) JPH0343232Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS579116Y2 (en]) * 1979-06-16 1982-02-22
JPS61125170U (en]) * 1984-10-12 1986-08-06

Also Published As

Publication number Publication date
JPS6453755U (en]) 1989-04-03

Similar Documents

Publication Publication Date Title
JPH0343232Y2 (en])
JPH0343233Y2 (en])
JP3610376B2 (ja) 気相成長装置用基板保持装置
JP2002280441A (ja) 成膜装置
JPH11254303A (ja) ラップ盤
JP3412849B2 (ja) 薄膜蒸着装置
JPS593945A (ja) ウエハ−の吸着装置
JPS5918638A (ja) ドライエツチング装置
JPH0526755Y2 (en])
JPH05104055A (ja) スピンナーヘツド
JPH07156061A (ja) 基板の両面研磨装置
JPH01153263A (ja) 光ディスク成形用スタンパの裏面研磨装置
JPH11156707A (ja) 研磨装置用ワークキャリヤ
JPH08319560A (ja) 真空蒸着装置および真空蒸着方法
JPH03107454A (ja) マグネトロンスパッタリングターゲットの固定方法
JPS6323707Y2 (en])
JP2877218B2 (ja) 表面処理装置
JPS6281030A (ja) 半導体基板乾燥装置
JPS6171865A (ja) 回転型塗布装置
JPH01287940A (ja) 回転処理装置
JPH05259056A (ja) 半導体基板のスピンコーティング装置
JPH03191059A (ja) スパッタリング装置
JPS63206469A (ja) スパツタ方法および装置
JPH01119669A (ja) 基板保持機構
JPH1034053A (ja) 基板回転装置